Purpose of the development: NANOFAB 100 is a modular technology platform for the formation of complexes with nanotechnology cluster arrangement. Nanotechnology complexes: The modular structure cluster organization 100 mm wafers

Recommended application field: Applications NTC NANOFAB 100 cover almost the entire field of nanotechnology research and development. The range of possibilities NANOFAB 100 extends from basic research to testing individual processing methods and modeling of nanoelectronic devices.

Advantages over analogues: The applied layout circuits, control system and advanced transport system STC 100 NANOFAB allows their use also for small-scale production of nanostructures and nanodevices. Jig-linked substrates Positioning System allows you to create complex multi-component 3D nanodevices through in the various modules of successive operations of nanotechnology with nanometer resolution. With STC "NANOFAB" can carry out research and manufacturing operations using SPM and AFM techniques in ultrahigh vacuum conditions (operating pressure of 10 {-7} Pa).

The development stage readiness: Ready for application

Description of the development:
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Formed on a platform NANOFAB 100 nanotech complexes (STC) process modules include the possibilities of group and nanolocal processing methods wafers up to 100 mm, as well as measuring and control modules. In the formation of the STC group of technology and instrumentation modules are combined into clusters, which are bound in the process chains across modules inter-operation of transmission and storage of samples. This allows the platform based on 100 NANOFAB create nanofactory to create rich nanostructures, nanodevices and nanosystems based on them. Ample NANOFAB 100 due to well-developed transport system, which is based on UHV robotic dispensers. Plenty of opportunity NANOFAB 100 are realized by a properly chosen cluster assembly scheme - the relationship between form clusters of functionally combined technological modules is carried out by means of ultrahigh-radial robot distributor. This ensures minimum transmission time interoperational samples and accordingly indispensable to the preservation of atomic nanotechnology surface cleanliness. The presence of a transmission unit substrates with perfecting device allows for complex processing cycles with the inclusion of group and nanolocal processes. Developed transport system with modules interoperational storage substrates allows a single STC 100 NANOFAB implement multiple technology cycles on several substrates. In addition to the modules of the NANOFAB 100 also includes individual process, control, measurement, analysis, and other devices. Platform modules NANOFAB 100 can function as a part of the STC, and independently, in some cases, possibly using auxiliary loading devices or load modules. At this time, the complex includes: - Analytical SPM chamber; - Camera loading; - Camera replacement probe heads.

corresponds technical description
Ready for implementation

Possibility of transfer abroad:
Licence's sale
Licence's sale
Technological document's sale
Creation of joint enterprise
Realization of finished commodity

Photo

Country Ukraine

For additional information turn to:
E-mail: gal@uintei.kiev.ua