Recommended application field: Technology and equipment have been petented, experimental facilities are available, and a demonstration can be done.

Advantages over analogues: Electron beam tehnology differs from the currently available methods of arc and laser evaporation of carbon by availability of many parameters for fine adjustment of the main stages of the evaporation proces, vapour flow formation and its condensation, namely: - Area, average values of evaporation rate and temperature of atoms (molecules) evaporated from the tungsten "hot pool". - Temperature, composition and molecular structire of the vapour flow the heated surfaces, vapour flow ionization, bleeding gases and using additives of inorganic and organic substances, uncluding catalysts of the growth of macromolecular structures of the type of nanotubes and fullerenes. Temperature of the condensation surface of an oriented vapour flow in the range from room temperature to 1000-1200 C and respective structures. - From amorphous to nano- and micro-sized. Possibility of producing macromolecular (fullerens, nanotubes) and diamondlike structires, carbides and composite materials (coatings) on their base is shown. A pilot production electron beam unit of up to 250 kW power adapted to the above technology variants is available. Areas of Application: Electronics and optoelectronics, medicine, chemical technology, instrument and mechanical engineering.

The development stage readiness: Tested experimental exploitation order

Description of the development:
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Technology is based on the method of electron beam evaporgationof carbon (graphite) using a liquid pool of tungsten and subsequent condensation of the vapour flow, which was suggested by us and patented in Ukraine and the USA. Evaparation is performed as follows: a plano-cylindrical tungsten tablet 5-10 mm high is placed on the end face a cylindrical graphite block of 50-100 mm diameter and specified length. The tablet is melted by the electron beam and forms a "hot pool". A continuous transport process of carbon dissolution in the liquid pool volume, subsequent eveporation from the pool surface and formation of an intensive vapour flow of carbon atoms (clusters) is established. Tungsten practically does not evaporate. Located near the above-mentioned cardon evaporation source is the second independent traditional source of electron beam evaporation of metallic and non-metallic materials, which are added to the main vapour flow of carbon by evaporation, if required (The third evaporation source can also be used). This method has been recenly improved by applyind the technique of reflection of the vapour flow of carbon (or carbon plus additives) from surfaces (mirrors) heated up to high temperatures (1000-1800 C), to form in space vapour flows of a specified orientation and particles which would be more uniform in terms of composition, structure and energy. This improvement is required at subsequent deposition of the vapor flow and "engineering" of the specified coating structure. Vapour flow ionization and bleeding gases into the vacuum chamber can be used as additional technological parameters for controlling the deposition process and condensate structure. Temperature the deposition surface is one of the main technological parameters, contrilling the condensate structure. Rate of eveporation of a graphite block of 70 mm diameter is equal to 1.0-1.1 kg/h.

Information about newness of the development:
there are Ukrainian patents -- 1 items
there are patents of other countries -- 1 items

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Country Ukraine

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E-mail: gal@uintei.kiev.ua