Purpose of the development: Designed to study the subsurface heterogeneity of semiconductor materials and structures.

Recommended application field: Reversible diagnosis of opaque objects. Diagnostic materials and electronic products: - visualization of the subsurface heterogeneities reversible thermo-physical properties, namely the visualization of defects and structural defects such as polishing scratches, cracks, voids, irregularities in the integrity of the coating, etc; - visualization of inhomogeneities in the epitaxial layers and visualization of topology; - visualization of regions with different impurity concentrations.

Technical characteristic: Radiation source: laser LGN-503. The main operating wavelength, m: 0.488. The diameter of the focal spot, m <10. Modulation Method: harmonious. Modulator: electro-optical. Frequency modulation: 2kGts - 150 kHz. The method of registering the FA signal - buzzer. Values - recorded the amplitude and phase of the signal FA. Scanning the sample by X-Y-coordinates: - by stepper drive 10 mm to 10 mm; - in increments of 10 microns. Maximum FOV: 20 x 20 mm. Output images - tabular and graphic halftone. Equipment: - micropositioning system - optoacoustic modulator, - laser LGN-503, - signal recorder - computer.

Advantages over analogues: Simultaneous use of piezoelectric and photoelectric methods of response registration. imaging depth: at 5 - 70 microns.

The development stage readiness: tested in laboratory condition

corresponds technical description
Conforms to technical characteristic

Photo

Country Ukraine

For additional information turn to:
E-mail: gal@uintei.kiev.ua