Purpose of the development: Making chemiresistors and sensitive layers of quartz Lakes-tors for sensor systems "artificial nose" composite thin films for electronic and optoelectronic devices.

Recommended application field: For the manufacture of sensor systems, electronic and optoelectronic devices.

The development stage readiness: Tested experimental exploitation order

Description of the development:
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The process plant consists of: a vacuum chamber; a substrate; substrate transport system; motor transport system; flap; evaporator inorganic semiconductor; evaporation of organic molecular compounds; metal evaporator; quartz sensors for monitoring molecular beams and weight of the film; fibers; display of the cooling system; controller quartz resonators; pressure sensor with the controller; the controlling computer; optical spectrometer; substrate handling system controller; sources evaporator power; ADC, DAC; VUP5 vacuum unit.

corresponds technical description
Ready for implementation

Possibility of transfer abroad:
Combinated reduction to industrial level

Photo

Country Ukraine

For additional information turn to:
E-mail: gal@uintei.kiev.ua