Declared technologies base

TRANSFER OF INNOVATIONAL TECHNOLOGIES

MEASURING COMPLEX FOR DIAGNOSIS OF GAS DISCHARGE PLASMA AND PLASMA TECHNOLOGICAL PROCESSES


Purpose of the development: For probe and optical plasma diagnostics in scientific research.

Recommended application field: Branches of plasma micro- and nanotechnologies, Scientific institutions of a physical and technical profile and directly enterprises that produce modern high-tech products.

Technical characteristic: Technical characteristics of the device "Plasma": - the voltage range on the probe is 100 - +100 V; - probe current range - 0.1 A - 300 mA; - current establishment time up to 0.01% of full scale - 100 s; - discreteness of current measurement 0.0015%; - total internal signal distortion (including all types of noise and non-linearity of voltage and current), typical value - 0.01% of full scale; - measurement speed - up to 10000 measurements / s; - connection to a computer - USB; - technical characteristics of the spectrometer: - resolution - ± 2nm; - the wavelength range is 400 - 1000 nm; - performance - up to 10 measurements of the full spectrum in seconds; - operating modes - spectrum visualization in real time, recording spectra, recording the time evolution of the spectrum; - input signal connection - optical fiber; - dispersing agent - diffraction grating; - connection to a computer - USB.

Advantages over analogues: Plasma probe diagnostics devices are manufactured by foreign companies, in particular Espion from Hiden Analytical (Great Britain), Smart Probe from Scientific Systems (Ireland), APS-3 (Germany). The technical characteristics of these devices approximately correspond to the characteristics of the Plazmometr device, and in some parameters (sensitivity when measuring the electron energy distribution function, intrinsic noise level, current sensitivity and linearity) it exceeds foreign analogues. This is confirmed by the results of a direct comparison with the APS3 device, conducted at the Plasma Physics Institute named after Max Planck (city of Garching, Germany).

The development stage readiness: Introduced in production

Description of the development:
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The developed complex includes: the Plazmometr device for automated plasma diagnostics using a Langmuir probe, a compact computerized optical spectrometer with fiber-optic inputs, a personal computer, and service software.

corresponds technical description
Guarantees stable results getting

Possibility of transfer abroad:
Licence's sale
Creation of joint enterprise
Joint production, sale, exploitation

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Country Ukraine

For additional information turn to:
E-mail: gal@uintei.kiev.ua

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